

This system uses directional single-wavelength laser beams to detect fine height displacement. It is effective for inspection of scratchs and irregularities.
Laser beams less diffuse on the surface of a solid thing so that they makes clear images of scratchs and irregularities.
Imaging of laser beams enables coincidental image processing with CCD inspection.
Wide dynamic range ensures coincidental inspection of high and low reflection subjects.
Example: Coincidental inspection of metal and active material in lithium ion battery
| Examples of Defect Inspection | Holes: Coat loss, Pinhole Stripe Defects: Application stripe, etc. Irregularities: Foreign particle, Scratch, etc. MURA (Unevenness): Application MURA, Repellency, etc. |
| Laser Diameter | φ0.03mm / φ0.1~0.6mm |
| Scan Width | 300mm / 600~3000mm (1 unit) |
| Image Processing Engine | MP Series |
| Control/Statistics PC | FA Spec. (OS: Windows XP Professional) |
| Inspection | Inspection judgment, Noise reduction, Spatial filter, Defect map, etc. |
| Review | Defect list (Map/Coordinates), Defect image, Trend graph, Statistics, etc. |
| Hawk view duplex | Multiple review connection management, Communication control, etc. |
Electrode, Separator, Sealing film, Collection electrode foil, Packaging laminate film, etc.