Fusion of LCD inspection technology with film inspection technology enables inspection of complicated circuit pattern for touch panel.
This system is compatible with variation of patterning precision against film, and a new inspection algorithm “PGC Process” is compatible with unstable factors changing by area.
This is the inspection system dedicated to films that require high-speed and high-precision inspection, for touch panel, flexible display and thin PV film.
Fusion of LCD inspection technology with film inspection technology realizes high-precision inspection for patterned film.
・New processing method “PGC Process” has been developed for inspection of patterned film.
This new system can inspect circuit section and be compatible with factors changing by area, so as to provide customers with stable inspection system for production line.
| Major Item | Minor Item | PGC Process | Matching (Reference) |
| Inspection Area | Pattern | Good | Good |
| Circuit | Good | Not bad | |
| Resistance | Resistance to illumination change | High | Low |
 Resistance to precision variation of patterning against film |
High | Low | |
| Resistance to lighting irregularity | High | Low |
Image processing clearly discriminating defective and good areas
| Resolution | 10.8μm×10.0μm |
| Transfer Speed | 10m/min |
| Inspection Precision | □30μm |
| Applicable Line & Space | 30μm/30μm |
| Targets | Metal electrode failure, Clear electrode failure, failure, etc. |
Pattern and circuit inspection
Touch panel
Flexible display, etc.
