This is an inspection system to detect mura (unevenness) produced in LCD production line.
Based on our wide experience in flat panel field, this system automates inspection line for stripe and dot defects, which has ever conducted visually by operators.
・Compatible with mura detection in LCD CF production line, sell assembly line and other lines
・Optical system to be selected according to process
・Compatible with various defects induced from spin coater, ink jet applicator and transfer
・General film thickness function and film thickness measuring head available as options
Mura of resist coating in CF, TFT and other production processes
| Image Capture | CCD Line Sensor Camera |
| Lighting | Transmission or Reflection Lighting |
| Light Source | LED or Metal Halide Lamp Optical filters according to each process |
| Stage | Conveyor Transfer Existing conveyor of the customer is applicable, but the system |
| Capability | ≥1mm in width To be evaluated with defect samples of the customer |
| Throughput | Inspection time ≤ 30s/sheet (2,200 x 2,500mm) |
・General film thickness function ・Film thickness measuring head
