This is a 3D measuring machine applicable to surface film thickness measurement.
Original wide range scanner ensures wide view measurement as wide as 700μm.
We have only developed Inline AFM compatible with large glass for FPD, which are used in many FPD manufacturers.
・Lineup covering universal model for test and analysis to a model having a large stage
Full automatic measurement available without damage to large glass
Simplified manual model good for analysis of wafer and specimen, which is available with reasonable price
・Equipped with high rigidity, soundproof design and high-performance active antivibration stage, which are compatible
with LD/ULD, automatic multi-point measurement and inline measurement
・Wide range scanner with 700μm view ensuring simultaneous measurement of all RGB pixels, ideal for monitoring
general view and inter-pixel step without distortion or stitching
・Up/Down Mode moving a new probe vertically, good for the measurement of trench depth
・Easy operation with registration of measuring coordinates, parameters and data analysis to recipe
| AS-7B-AUTO | AS-7B-μX | |
| Measurement Mode | Contact AFM, AC-AFM, Up/Down Mode, Phase Image (Option) | |
| XY Scanner | Wide Range Scanner: 220x220, 440x440, 700x700m Built-in Closed Loop Sensor High-resolution Scanner: 30x30m |
|
| Z Scanner | 15m Stroke, Equipped with Displacement Sensor Horizontal Distortion Canceling Control |
|
| Reproducibility | 3σ≦1nm | |
| Measurement Time | 45s/point (1D measurement) | |
| Optical Microscope | Power Zoom/Focus, x98-x685 14” Monitor | |
| Cantilever | Premount Attachment Type, Manufacturer: Olympus, Nanoworld, NonoTools (HDC), CNT Probe etc. |
|
| Stage Size | Max. 2,200x2,500mm Linear Motor Stage |
Standard 150x150mm Pulse Motor Stage |
| Antivibration | Standard Active Antivibration Stage | Passive or Active Antivibration Stage |
