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High speed 3D inspection

 Non-contact 3D measurement techniques mainly include a method that uses light interference (optical interferometry), a method that uses the focus position of a lens (confocal method), and a method that uses triangulation (stereo method, optical cutting) Law). Each method has its strengths and weaknesses, so you need to choose the method that is right for your measurement.

  In order to respond to the market demand that we want to inspect all products with high accuracy, we use our original image processing and a newly developed ultra-high-speed CMOS sensor based on the high-speed light-section method to achieve high accuracy. We have developed an in-line 3D measurement system that enables high-speed inspection.



Characteristics of each measurement method

Method Optical interference Confocal Triangulation
Accuracy 1~100nm 100nm~1um 1um~
Tact Very Long Long Short
Area Small Small Wide

Our technologies for High-speed, high-accuracy

  • Newly developed ultra-high speed CMOS sensor
    Capable of acquiring approximately 74 million points of 3D data per second 
  • In-camera hardware processing
    By installing a processing circuit inside the camera, it outputs data converted to 3D data, greatly reducing the burden of measurement processing.
  • Projector lighting
    We developed a projector that projects lines with uniform brightness and high linearity. We construct a telecentric optical system for both projection and imaging.
  • TDS processing (Time Delay Scanning)
    In order to reduce the influence of surface conditions, TDS processing, our proprietary algorithm, is used to achieve measurement repeatability of 3σ <1um.

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Technical Information