November 6th,2024 exhibition
We are pleased to announce that we will be exhibiting at SEMICON Europa 2024, to be held at Messe München in München, Germany from November 12th (Tue) to 15th (Fri), 2024 (local time).
The exhibition is in collaboration with our exclusive distributor in Europe and America, ClassOne Equipment.
Exhibited Products
For the full-scale sales launch in Europe and America, we will be presenting our "WM Series" wafer surface inspection system, which has obtained overseas certifications. We anticipate increased domestic and international sales of this semiconductor surface inspection equipment.
Products on Display
Wafer Surface Inspection System - WM Series
These inspection systems are essential for semiconductor device manufacturing, material development, and equipment management. They use semiconductor lasers as the light source, which reduces running costs. They are capable of detecting nano-level particles (foreign substances) and are widely used both domestically and internationally.
▼ Wafer Surface Inspection System (WM Series) Product Page
https://www.takano-kensa.com/kensa/products/semiconductor/wm/
Product Specifications
Major Specification | WM-7SR | WM-10R |
---|---|---|
Maximum Detection Sensitivity (Bare Si) | 0.079μm (0.061μm optional) | 0.048μm |
Wafer Size | 2 inch ~ 8 inch | 4 inch ~ 12 inch |
Throughput | 55 wph @ 8 inch, 60 wph @ 6 inch | 70 wph @ 12 inch |
Dynamic Range | 0.079μm ~ 5.0μm | 0.048μm ~ 5.0μm |
Device Size (mm) | W860 × D900 × H1,650 | W1,480 × D1,230 × H1,960 |
Safety Certification | FDA, CE, SEMI | FDA, CE, SEMI |
SEMICON Europa Exhibition Details