ウェーハ表面検査装置 (WM series)

Non-patterned 300mm Wafer surface Inspection system

WM - 10 is a standard model of 300 mm wafer.
It is a high sensitivity inspection system of 60 nm.

Non-patterned below 200mm Wafer surface Inspection system

WM - 7 series is the most reasonable high - performance model below 200 mm wafer size.
WM - 7SG can inspect transparent wafers.

Vi-series Specification

1. Original Optical System for High-sensitivity

• WM-10 have 2axis Incident angle for particle.

• WM-series have 2 wide NA lens for High-sensitivity detected.

2. Spiral Scan With high-resolution XY-potsion

• WM-series are spiral scan method with rotation speed control.
• XY-Data send to EB review Equipment then it can be review with easy alignment.