製品情報

Product Information

ウェーハ表面検査装置 (WM series)

Non-patterned 300mm Wafer surface Inspection system

WM - 10 is a standard model of 300 mm wafer.
It is a high sensitivity inspection system of 60 nm.


Non-patterned below 200mm Wafer surface Inspection system

WM - 7 series is the most reasonable high - performance model below 200 mm wafer size.
WM - 7SG can inspect transparent wafers.


Vi-series Specification

 WM-10 WM-7S/7SG
Sensitivity48nm@Bare-Wafer80nm@Bare-wafer:WM-7S
200nm@Glass-wafer:WM-7SG
Wafer Size~300mm~200mm
Optical SourceLaser Diode(405nm)
LoaderFOUP(1 or2)/Open CassetteOpen Cassette
Size 1482mm×1173mm×1950mm 860mm×900mm×1650mm
Application Bare-wafer/Filmed-wafer

1. Original Optical System for High-sensitivity

  • WM-10 have 2axis Incident angle for particle.
  • WM-series have 2 wide NA lens for High-sensitivity detected.

2. Spiral Scan With high-resolution XY-potsion

  • WM-series are spiral scan method with rotation speed control.
  • XY-Data send to EB review Equipment then it can be review with easy alignment.

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タカノ株式会社 画像計測部門

TEL:03-3253-8261