Products

Mra/Film Thickness Inspection System

This is an inspection system to detect mura (unevenness) produced in LCD production line.
Based on our wide experience in flat panel field, this system automates inspection line for stripe and dot defects, which has ever conducted visually by operators.


Features

  • Compatible with mura detection in LCD CF production line, sell assembly line and other lines
  • Optical system to be selected according to process
  • Compatible with various defects induced from spin coater, ink jet applicator and transfer
  • General film thickness function and film thickness measuring head available as options

Targets

Mura of resist coating in CF, TFT and other production processes

Specifications

Image Capture CCD Line Sensor Camera
Lighting Transmission or Reflection Lighting
Light Source LED or Metal Halide Lamp
Optical filters according to each process
Stage Conveyor Transfer
Existing conveyor of the customer is applicable, but the system
Capability ≥1mm in width
To be evaluated with defect samples of the customer
Throughput Inspection time ≤ 30s/sheet (2,200 x 2,500mm)

Options

  • General film thickness function
  • Film thickness measuring head
Related technical information

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technical information name dammy
technical information name dammy


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