Pattern Inspection System (Vi series)

The optical inspection system with high speed and accuracy that can finds wiring patterns, cracks, and particles and etc.

Vi-series Specification

	Vi-4207R, C	Vi-4307M, C	Vi-5301M
Wafer Size	~200mm	~300mm
Handling	Robot
Loader	Open Cassette	Open Cassette, FOUP, FOSB
Defect Size(μm)	1.2/ 2.4 / 5.0 (objective lens 10x / 5x / 2.5x)
Size	W2280xD1140xH2060	W2280xD1140xH2060	W2600xD1440xH1790
Weight	1650kg	1700kg	2800kg
Application	CMOS Image Sensor, Power device, RF Filter, MEMS, Glass, TAIKO Wafer

1. Example of defects

2. Fine detection by area(layer) classification

• The area classification realizes multiple inspection sensitivity and tolerance depending on features of device pattern.
• Each area can have inspection parameters.

3. Refined image by various lighting and color image

• Defects that cannot be detected by grayscale inspection can be detected by color inspection.
• Combination of various light makes invisible defects see.