ウェーハ外観検査装置　(Vi series)

ウェーハの配線パターンやクラック、異物混入などの製品外観を高速、高精度に検査します。

Vi-series Specification

1. Example of defects

2. Fine detection by area(layer) classification

• The area classification realizes multiple inspection sensitivity and tolerance depending on features of device pattern.
• Each area can have inspection parameters.

3. Refined image by various lighting and color image

• Defects that cannot be detected by grayscale inspection can be detected by color inspection.
• Combination of various light makes invisible defects see.