Front-End Inspection Systems
About Front-End Inspection Systems
We provide high-quality, cost-effective equipment that enhances quality control and yield management in front-end processes.
Non-Patterned Wafer Inspection System
WM Series
WM Series enables highly sensitive detection of particles and defects on non-patterned wafer surface and is utilized in a wide range of process control applications.
Whole-Surface Film Thickness Inspection System
Whole-Surface Film Thickness Inspection System (Thinspector)
Thinspector enables inspection of non-uniformity or film thickness across the entire wafer surface in a single scan.