Whole-Surface Film Thickness Inspection System (Thinspector)
About Thinspector
Conventional film thickness measurement systems measure thickness at multiple points on the wafer. In contrast, Thinspector inspects the entire wafer surface with a single scan.
Filmed Wafer Management
- System Control
- Process control
- Material & component management
- Equipment pre-shipment inspection
- Compound wafer shipping inspection
- Reclaimed wafer shipping inspection, and more.
Device / Equipment / Material Manufacturers
- Device manufacturers
- R&D
- Compound wafer manufacturers
- Reclaimed wafer manufacturers
- Chemical material manufacturers
- Material mfrs.
- R&D, and more.
Features
Specifications
| Target wafer size | ~ 300mm |
|---|---|
| Inspection Resolution (X x Y) | 350 × 350 μm |
| Inspection Item | Film unevenness |
| Measurement Range | 300–15000nm |
| Number of Measurement Points | 600,000 points / 12-inch |
| System Size (mm) | W1470 × D2490 × H1770 |