Flat Panel Display (FPD) Mura/Film Thickness Inspection System
About Mura/Film Thickness Inspection System
Mura/Film Thickness Inspection Equipment detects Mura defects occurring in the LCD production process.
Based on our extensive experience in the flat panel field, we have automated inspection processes that previously relied on operator visual inspection, detecting both streak-like and dot-like Mura defects.
Inspection Targets
- Resist Coating Mura in CF Process
- Resist Coating Mura in TFT Process
- Resist Coating Mura in various processes, etc.
Defect Detection Example
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Mura in OC Film -
Mura in PI Film
And more.
Features
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Achieves Mura Detection in Each Process
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Capable of Detecting Defects Caused by Various Factors
Specifications
| Imaging Method | Line sensor camera |
|---|---|
| Illumination Method | Transmitted illumination or reflected illumination |
| Light Source Used | LED / Optical filter tailored to each process |
| Inspection Stage | Conveyor transport *May require modification if installed on customer's existing conveyor. |
| Defect Detection Capability | 1mm or larger in width |
| Example Tact Time | Within 30sec/sheet (2200×2500mm) |
Options
- Equipped with Film Thickness Measurement Head