About PSL Calibration Wafer
About PSL Calibration Wafer
PSL particle-coated wafers are used to calibrate and evaluate wafer surface particle inspection equipment, and play an important role in ensuring the detection sensitivity and accuracy of the inspection equipment.
*PSL particles: polystyrene latex particles
We provide wafers coated with the particle size (*1) desired by the customer. These are ideal for semiconductor inspection and measurement applications.
*1: Select from particle sizes provided by our company
Applications
- Inspection equipment calibration
- Defect Detection Test
- Pseudo foreign matter defects
Can be used in combination with our Non-Patterned Wafer Inspection System (WM Series).
Application Examples
 About PSL Calibration Wafer |
 |
 Particle Inspection System WM Series |
Monitor Wafer System Control |
 Process System |
Sample Wafer Map
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Each color represents a different PSL size
Features
-
Spot deposition of
arbitrary particle sizes available -
Supports all wafer sizes
(2 to 12 inches) -
Extensive track record
in particle deposition